Area-Selective Deposition of Tantalum Nitride with Polymerizable Monolayers: From Liquid to Vapor Phase Inhibitors
Author:
Affiliation:
1. International Business Machines─Almaden Research Center, 650 Harry Road, San Jose, California 95120, United States
2. International Business Machines─Semiconductor Technology Research, 257 Fuller Road, Albany, New York 12203, United States
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.1c03436
Reference47 articles.
1. Selective atomic layer deposition of HfO2 on copper patterned silicon substrates
2. Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
3. From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity
4. Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers
5. Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition
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