1. Institute of Plasma Physics and Laser Microfusion, ul. Hery 23, 01-497 Warsaw, Poland
2. Institute of Fundamental Technological Research Polish Academy of Sciences, ul. Pawinskiego 5b, 02-106 Warsaw, Poland
3. Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, ul. Koszykowa 75, 00-662 Warsaw, Poland