Full Activation of Boron in Silicon Doped by Self-Assembled Molecular Monolayers-Reference-Cited by-同舟云学术

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Full Activation of Boron in Silicon Doped by Self-Assembled Molecular Monolayers

Published:2019-12-10 Issue:1 Volume:2 Page:268-274
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Gao Xuejiao¹,Kolevatov Ilia²,Chen Kaixiang¹,Guan Bin¹,Mesli Abdelmadjid³,Monakhov Edouard²,Dan Yaping¹^ORCID

Affiliation:

1. University of Michigan − Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai 200240, China

2. Department of Physics, Center for Material Science and Nanotechnology, University of Oslo, Blindern, P.O. Box 1048, N-0316 Oslo, Norway

3. Institut Matériaux Microélectronique Nanosciences de Provence, UMR 6242 CNRS, Université Aix-Marseille, 13397 Marseille Cedex 20, France

Funder

Science and Technology Commission of Shanghai Municipality

National Natural Science Foundation of China

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.9b00748

Reference32 articles.

1. Controlled nanoscale doping of semiconductors via molecular monolayers

2. Silicon-based molecular nanotechnology

3. Atomically Precise Placement of Single Dopants in Si

4. Nanopatterning on H-Terminated Si(111) Explained as Dynamic Equilibrium of the Chemical Reaction with Methanol

5. Doping of semiconductors by molecular monolayers: monolayer formation, dopant diffusion and applications

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Boron Doping in Next-Generation Materials for Semiconductor Device;Characteristics and Applications of Boron;2022-10-26

2. De-carbonization of self-assembled molecular monolayers doping in silicon;AIP Advances;2022-09-01

3. Demonstration of Monolayer Doping of Five-Stacked Ge Nanosheet Field-Effect Transistors;ACS Applied Electronic Materials;2022-06-27

4. Synthesis and Characterization of Boron Thin Films Using Chemical and Physical Vapor Depositions;Coatings;2022-05-16

5. Ultradoping Boron on Si(100) via Solvothermal Chemistry**;Chemistry – A European Journal;2021-08-03

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