Demonstration of Monolayer Doping of Five-Stacked Ge Nanosheet Field-Effect Transistors-Reference-Cited by-同舟云学术

Demonstration of Monolayer Doping of Five-Stacked Ge Nanosheet Field-Effect Transistors

Published:2022-06-27 Issue:7 Volume:4 Page:3592-3597
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Chu Chun-Lin¹,Luo Guang-Li¹^ORCID,Chou Dean²,Hsu Shu-Han³⁴^ORCID

Affiliation:

1. Taiwan Semiconductor Research Institute, National Applied Research Laboratories, Hsinchu 30076, Taiwan

2. Department of Biomedical Engineering, National Cheng Kung University, 1 University Road, Tainan 701, Taiwan

3. Functional Advanced Materials Engineering Research Center (FAME), Sirindhorn International Institute of Technology (SIIT), Thammasat University, Pathum Thani 12120, Thailand

4. School of Bio-Chemical Engineering and Technology, Sirindhorn International Institute of Technology (SIIT), Thammasat University, Pathum Thani 12120, Thailand

Funder

National Taipei University of Technology

Thammasat University

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.2c00551

Reference18 articles.

1. Long, B.; Alessio Verni, G.; O’Connell, J.; Holmes, J.; Shayesteh, M.; O’Connell, D.; Duffy, R. In Molecular Layer Doping: Non-Destructive Doping of Silicon and Germanium, Proceedings of the International Conference on Ion Implantation Technology, 2014.

2. Duffy, R.; Kennedy, N.; Mirabelli, G.; Galluccio, E.; Hurley, P. K.; Holmes, J. D.; Long, B. In Monolayer Doping and Other Strategies in High Surface-to-Volume Ratio Silicon Devices, 18th International Workshop on Junction Technology (IWJT 2018), 2018; pp 1–6.

3. Controlled nanoscale doping of semiconductors via molecular monolayers

4. Wafer-Scale, Sub-5 nm Junction Formation by Monolayer Doping and Conventional Spike Annealing

5. Doping of semiconductors by molecular monolayers: monolayer formation, dopant diffusion and applications

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