Facile and Stable n+ Doping Process Via Simultaneous Ultraviolet and Thermal Energy for Coplanar ALD-IGZO Thin-Film Transistors
Author:
Affiliation:
1. Division of Materials Science and Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul, Republic of Korea
Funder
Ministry of Trade, Industry and Energy
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acsaelm.1c00463
Reference40 articles.
1. The physics of amorphous-silicon thin-film transistors
2. 8.1:Invited Paper: Value of LTPS: Present and Future
3. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
4. Thin-Film Transistors
5. Material characteristics and applications of transparent amorphous oxide semiconductors
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