Electron Microscopy Observation of TiO2 Nanocrystal Evolution in High-Temperature Atomic Layer Deposition-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Electron Microscopy Observation of TiO2 Nanocrystal Evolution in High-Temperature Atomic Layer Deposition

Published:2013-10-09 Issue:11 Volume:13 Page:5727-5734
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Shi Jian,Li Zhaodong,Kvit Alexander,Krylyuk Sergiy¹²,Davydov Albert V.¹,Wang Xudong

Affiliation:

1. Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States

2. Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742, United States

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/nl403566u

Reference40 articles.

1. Atomic Layer Deposition: An Overview

2. Atomic layer deposition (ALD): from precursors to thin film structures

3. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials

4. High-κ gate dielectrics: Current status and materials properties considerations

5. Application of HfSiON to Deep-Trench Capacitors of Sub-45-nm-Node Embedded Dynamic Random-Access Memory

Cited by 51 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Preventing unwanted atomic layer deposition by liquid sealing;Nano Trends;2024-09

2. Numerical simulations of reactive cold sintering of BaTiO3;Journal of the European Ceramic Society;2024-05

3. Ceramic-based smart thin films;Advanced Ceramic Coatings for Energy Applications;2024

4. In situ preparation of nano cone-like structures of rutile titanium oxides on titanium implants by one-step femtosecond laser irradiation for enhanced mechanical properties and biocompatibility;Journal of Materials Research and Technology;2023-11

5. Polymer-based triboelectric nanogenerators: Materials, characterization, and applications;Progress in Polymer Science;2023-09

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3