Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials-Reference-Cited by-同舟云学术

Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials

Published:2004-05 Issue:7 Volume:201 Page:1443-1452
ISSN:0031-8965
Container-title:physica status solidi (a)
language:en
Short-container-title:phys. stat. sol. (a)

Author:

Niinist� L.,Nieminen M.,P�iv�saari J.,Niinist� J.,Putkonen M.,Nieminen M.

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference71 articles.

1. and US Patent 4 058 430 (1977).

2. Atomic layer epitaxy

3. and in: H. S. Nalwa (Ed.), Handbook of Thin Film Materials, Vol. 1 (Academic Press, San Diego, 2002), pp. 103-159.

4. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges

5. Thin-film electroluminescence: high performance without complexity

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