Nanofabrication via Maskless Localized Atomic Layer Deposition of Patterned Nanoscale Metal Oxide Films
Author:
Affiliation:
1. Laboratoire des Multimatériaux et Interfaces, UMR CNRS 5615, Univ Lyon, Université Claude Bernard Lyon 1, F-69622 Villeurbanne, France
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsanm.1c02550
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