Pattern Shape Control for Heat Treatment Purification of Electron-Beam-Induced Deposition of Gold from the Me2Au(acac) Precursor
Author:
Affiliation:
1. Department of Materials Science and Engineering, Royal Institute of Technology, Brinellvägen 23, 100 44 Stockholm, Sweden
2. FEI Electron Optics, Achtseweg Noord 5, 5600 KA Eindhoven, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la203599c
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