Funder
Deutsche Forschungsgemeinschaft
H2020 Marie Sklodowska-Curie Actions
European Cooperation in Science and Technology
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Reference64 articles.
1. I. Utke, S. Moshkalev, P. Russel, Nanofabrication using focused ion and electron beams (Oxford University Press, UK, 2012)
2. J.M. De Teresa, Nanofabrication: Nanolithography techniques and their applications (IOP Publishing Ltd, USA, 2020)
3. R. Winkler, J.D. Fowlkes, P.D. Rack, H. Plank, J. Appl. Phys. 125, 210901 (2019). https://doi.org/10.1063/1.5092372
4. M. Huth, F. Porrati, S. Barth, J. Appl. Phys. 130, 170901 (2021). https://doi.org/10.1063/5.0064764
5. H. Plank, R. Winkler, C.H. Schwalb, J. Hütner, J.D. Fowlkes, P.D. Rack, I. Utke, M. Huth, Micromachines 11, 48 (2020). https://doi.org/10.3390/mi11010048
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