Living up to its potential—Direct-write nanofabrication with focused electron beams
Author:
Affiliation:
1. Institute of Physics, Goethe University, Max-von-Laue-Strasse 1, 60438 Frankfurt am Main, Germany
Funder
Deutsche Forschungsgemeinschaft
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0064764
Reference86 articles.
1. Gas-assisted focused electron beam and ion beam processing and fabrication
2. Focused electron beam induced deposition: A perspective
3. O. Ingolfsson, Low-Energy Electrons Fundamentals and Applications (Jenny Stanford Publishing, New York, 2019), p. 47.
4. Precursors for direct-write nanofabrication with electrons
5. Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective
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