Molecular Orbital Studies of Titanium Nitride Chemical Vapor Deposition: Gas Phase Complex Formation, Ligand Exchange, and Elimination Reactions
Author:
Affiliation:
1. Department of Chemistry, Wayne State University, Detroit, Michigan, 48202
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm000107l
Reference58 articles.
1. TiN coatings on steel
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4. Chemical vapour deposition of nitride thin films
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