Model studies of low temperature titanium nitride thin film growth
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Physical and Theoretical Chemistry
Reference47 articles.
1. Diffusion barriers in thin films
2. Electrical characteristics of TiN contacts toNsilicon
3. Investigation of reactively sputtered TiN films for diffusion barriers
4. Structure and Strength Effects in CVD Titanium Carbide and Titanium Nitride Coatings
5. Chemical vapor deposition of titanium nitride at low temperatures
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