Investigation of reactively sputtered TiN films for diffusion barriers
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference24 articles.
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5. Suppression of platinum penetration failure in Ti/Pt/Au beam lead metal systems using a TiN diffusion barrier
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