Suppression of platinum penetration failure in Ti/Pt/Au beam lead metal systems using a TiN diffusion barrier
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Proc. 1969 Annu. Reliability Symp.;Peck,1969
2. A study on the penetration of platinum into silicon in Ti/Pt/Au beam lead metallization systems
3. Localized platinum silicide growth causing Ti/Pt/Au beam lead metallization instability
4. Beam-Lead Technology
5. Effects of Titanium Layer as Diffusion Barrier in Ti/Pt/Au Beam Lead Metallization on Polysilicon
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1. STEM nanoanalysis of Au/Pt/Ti-Si3N4 interfacial defects and reactions during local stress of SiGe HBTs;Nanoscale Research Letters;2011-10-31
2. Improving the oxidation resistance of AlCrN coatings by tailoring chromium out-diffusion;Spectrochimica Acta Part B: Atomic Spectroscopy;2010-11
3. Diffusional breakdown of nickel protective coatings on copper substrate in silver-copper eutectic melts;Metallurgical and Materials Transactions A;1997-04
4. Chemical vapor deposition of titanium, zirconium, and hafnium nitride thin films;Chemistry of Materials;1991-11-01
5. Intermetallic phase formation and breakdown of Mo diffusion barriers in Ni-Mo-Cu layers;Metallurgical Transactions A;1991-07
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