Surface microscopy with scanned electron beams

Abstract

A brief review is given of the methods that are available for studying surfaces on a microscope scale. The use of finely focused scanned electron beams is described in detail. Examples are given of Auger and secondary electron spectroscopy and microscopy, and of diffraction techniques. These examples are largely taken from recent work of the authors on Ag layers on bulk single-crystal Si (111), Si (100) and W (110) surfaces, but applications to other materials and to thin films are also discussed. Future developments are briefly outlined.