Formation and Thermal Stability of End-of-Range Defects in Ge Implanted Silicon

Abstract

ABSTRACTBy means of transmission electron microscopy we have studied the redissolution of extended end-of-range defects during high temperature rapid thermal annealing. We find, that after the transformation of initially present {113} stacking faults into energetically more favorable structures, each type of end-of-range defect establishes its individual redissolution rate with {111} faulted loops being the most stable configuration.