Plasma Deposition of Silicon Clusters: A Way to Produce Silicon Thin Films With Medium-Range Order ?

Abstract

ABSTRACTThe growth of hydrogenated amorphous silicon films is often explained by the arrival of SiHx radicals on the substrate and the subsequent cross-linking reactions leading to an homogeneous material which can be described by a continuous random network. Here we summarize our recent Work on a new class of silicon thin films produced under plasma conditions where silicon clusters and radicals contribute to the deposition. The main aspects are: i) silicon clusters with sizes of the order of 1-5 nm are easily formed in silane plasmas; ii) these silicon clusters can contribute to the deposition and lead to the formation of films with medium-range order (“polymorphous silicon”); iii) despite their heterogeneity, the films have improved transport properties and stability with respect to a-Si:H. The excellent transport properties are confirmed by the achievement of stable single junction p-i-n solar cells with efficiencies close to 10 %.