Possible routes for cluster growth and particle formation in RF silane discharges
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference62 articles.
1. Particle Distributions and Laser-Particle Interactions in an RF Discharge of Silane
2. Particle densities in radio-frequency discharges of silane
3. Particle trapping phenomena in radio frequency plasmas
4. Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
5. Effects of low‐frequency modulation on rf discharge chemical vapor deposition
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