Nanostructure of a-Si:H and Related Materials by Small-Angle X-Ray Scattering

Abstract

ABSTRACTThe use of small-angle x-ray scattering to examine nanostructural features of a-Si:H and the related alloys a-SiGe:H and a-SiC:H will be reviewed. A wide range of H, Ge, and C compositions has been investigated. The films examined came from several film- and device-making groups and represent current state-of-the-art solar cell material or attempts to develop improved and more stable material. A detailed comparison of the three classes of materials reveals dramatic differences in nanostructure. The diffuse component of the small-angle scattering, not recognized or discussed in previous small-angle scattering experiments on these materials by other groups, is shown to contain potentially valuable information on the atomic-scale structure.