Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section Tem Specimen Preparation

Author:

Giannuzzi L. A.,Drown J. L.,Brown S. R.,Irwin R. B.,Stevie F. A.

Abstract

AbstractA site specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. Focused ion beams are used to slice an electron transparent sliver of the specimen from a specific area of interest. Micromanipulation lift-out procedures are then used to transport the electron transparent specimen to a carbon coated copper grid for subsequent TEM analysis. The experimental procedures are described in detail and an example of the lift-out technique is presented.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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5. 26. Giannuzzi L.A. , Drown J. L. , Brown S.R. , Irwin R.B. , and Stevie F. A. , in press, J. Mat. Res.

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