A New Technique for High Speed X-Ray Double Crystal Rocking Curve analysis

Abstract

AbstractA novel technique for high speed X-ray double crystal rocking curve analysis of epitaxial layers is described. It employs specimen rotation about an axis almost normal to the Bragg planes in order to optimize Bragg plane tilts. Very rapid set-up is possible by peak searching using this rotation axis rather than the standard ω scan. A rotation stage suitable for a Bede Scientific Instrument Model 6 diffractometer is described and its performance assessed. Experimental and theoretical values of the shift in centroid of the ω scan rocking curve as a function of rotation angle are in excellent agreement.