A study of etch pit density and x-ray rocking curves for GaAs substrate evaluation-Reference-Cited by-同舟云学术

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A study of etch pit density and x-ray rocking curves for GaAs substrate evaluation

Published:1991-05 Issue:5 Volume:20 Page:345-352
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Tartaglia J. M.,Crochiere S. M.,Kalnas C. E.,Farrington D. L.,Kronwasser J. A.,Pearah P. J.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02670882.pdf

Reference37 articles.

1. L. V. Golubev, V. N. Karyaev, S. V. Kidalov, T. S. Argunova and I. L. Shul'pina, Sov. Phys. Tech. Phys.30, 1353 (1985).

2. T. Takebe, M. Shimazu, A. Kawasaki, T. Kotani. R. Nakai, K. Kikuchi, S. Murai, K. Tada, S. Akai and T. Suzuki, in: “Semi-Insulating III-V Materials,≓ Kah-nee-ta, Warm Springs, OR, 1984, eds. D. C. Look and J. S. Blakemore (Shiva, Nantwich, 1984) p. 335.

3. T. Matsamura, T. Obokata and T. Fukuda, J. Appl. Phys.57, 1182 (1985).

4. K. Kitahara, K. Nakai and S. Shibatomi, J. Electrochem. Soc.129, 880 (1982).

5. A. T. Hunter, Appl. Phys. Lett.47, 715 (1985).

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