Layer by Layer Growth of GaN Films by Low Temperature Cyclic Process

Abstract

AbstractRecently we have proposed a new layer-by-layer method for deposition of group-III nitrides from elemental precursors (Ga, N2). This technique is based on a two-step cyclic process, which alternates Pulsed Laser Deposition (PLD) and nitrogen plasma treatment. We have shown that such a process allows to control independently the structure and the N-content of the growing film. The objective of this work is to develop the cyclic process for achieving high quality GaN films. We explore the opportunities to grow stoichiometric epitaxial films on different substrates at relatively low temperatures (400°C to 600°C). This will gives us the possibility to use ZnO epitaxial layers as a buffer without thermal degradation. UV- Visible transmission spectra, X-ray diffraction scans and Atomic Force Microscopy are some of the tools used to characterise and compare the deposited films.