Deep Level Defects, Luminescence, and the Electro-Optic Properties of SiGe/Si Heterostructures

Abstract

AbstractDeep levels and luminescence in SiGe/Si heterostructures and quantum wells have been investigated. We have studied the effects of Be- and B-doping on the luminescent properties of Si1−xGex/Si single and multiquantum wells. No new levels, or enhancement of luminescence, from that in undoped samples, is detected in samples which are selectively doped in the well-regions, implying that the observed luminescence in the undoped quantum wells is a result of alloy disordering. Slight enhancement of luminescence is observed in disordered wells and in quantum wires made by electron beam lithography and dry etching. Deep levels have been identified and characterized in undoped Si1-xGex alloys. Hole traps in the p-type layers have activation energies ranging from 0.029-0.45 eV and capture cross sections (σ∞) ranging from 10−9 to 10−20 cm2. Possible origins of these centers are discussed. Some possibilities of obtaining enhanced electro-optic coefficients in SiGe/Si heterostructures are discussed.