Metastable Defects in a-SiOx:H and a-SiCx:H

Abstract

ABSTRACTMetastable defects are created in hydrogenated amorphous silicon alloys presumably by the same mechanism as in a-Si:H. We find metastable defects created in a-SiCx:H and a-SiOx:H by hopping injection of photocarriers from adjacent a-Si:H layers. In a-SiCx:H the defects can be created only below T=150K, they anneal at TE=400K. In a-SiOx:H they are created at or below T=300K, they anneal at TE=480K. The anneal temperature is nearly independent of the creation temperature. The defects are detected by their charge exchange with adjacent a-Si:H layers whose conductance is thereby changed.