A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy
Author:
Chen Shuo1ORCID, Feng Liuhaodong1, Guo Song1ORCID, Ji Yucheng1, Zeng Shuwen2, Peng Xinlin1, Xu Yang1, Hu Tianbao2, Wu Zhenyu123, Wang Shinan12
Affiliation:
1. School of Microelectronics, Shanghai University, Shanghai 201899, China 2. Shanghai Industrial µTechnology Research Institute, Shanghai 201899, China 3. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200031, China
Abstract
To achieve a wide range and high accuracy detection of the vacuum level, for example, in an encapsulated vacuum microcavity, a composite-type MEMS Pirani gauge has been designed and fabricated. The Pirani gauge consists of two gauges of different sizes connected in series, with one gauge having a larger heat-sensitive area and a larger air gap for extending the lower measurable limit of pressure (i.e., the high vacuum end) and the other gauge having a smaller heat-sensitive area and a smaller air gap for extending the upper measurable limit. The high-resistivity titanium metal was chosen as the thermistor; SiNx was chosen as the dielectric layer, considering the factors relevant to simulation and manufacturing. By simulation using COMSOL Multiphysics and NI Multisim, a range of measurement of 2 × 10−2 to 2 × 105 Pa and a sensitivity of 52.4 mV/lgPa were obtained in an N2 environment. The performance of the fabricated Pirani gauge was evaluated by using an in-house made vacuum test system. In the test, the actual points of measurement range from 6.6 × 10−2 to 1.12 × 105 Pa, and the highest sensitivity is up to 457.6 mV/lgPa. The experimental results are better in the range of measurement, sensitivity, and accuracy than the simulation results. The Pirani gauge proposed in this study is simple in structure, easy to manufacture, and suitable for integration with other MEMS devices in a microcavity to monitor the vacuum level therein.
Funder
the National Key Research and Development Program of China
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
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