Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor-Reference-Cited by-同舟云学术

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Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor

Published:2024-04 Issue:2 Volume:33 Page:274-281
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Song Xiangyu¹,Huang Lifeng¹,Lin Yuanjing²^ORCID,Hong Linze¹^ORCID,Xu Wei¹^ORCID

Affiliation:

1. College of Electronics and Information Engineering and the State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen, China

2. School of Microelectronics, Southern University of Science and Technology, Shenzhen, China

Funder

National Natural Science Foundation of China

Natural Science Foundation of Guangdong Province

Shenzhen Science and Technology Program

Research Team Cultivation Program of ShenZhen University

Shenzhen-Hong Kong-Macau S&T Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/84/10494013/10452801.pdf?arnumber=10452801

Reference23 articles.

1. Wafer-to-wafer bonding of nonplanarized MEMS surfaces using solder

2. Microstructured vacuum gauges and their future perspectives

3. An Improved Performance Poly-Si Pirani Vacuum Gauge Using Heat-Distributing Structural Supports

4. A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

5. Surface-Micromachined Silicon Carbide Pirani Gauges for Harsh Environments

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