Surface-Micromachined Silicon Carbide Pirani Gauges for Harsh Environments-Reference-Cited by-同舟云学术

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Surface-Micromachined Silicon Carbide Pirani Gauges for Harsh Environments

Published:2021-01-15 Issue:2 Volume:21 Page:1350-1358
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Mo Jiarui^ORCID,Middelburg Luke M.^ORCID,Morana Bruno,van Zeijl H. W.,Vollebregt Sten^ORCID,Zhang Guoqi^ORCID

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9298186/09178352.pdf?arnumber=9178352

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor;Journal of Microelectromechanical Systems;2024-04

2. A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material;Microsystems & Nanoengineering;2024-03-22

3. Nanogap CMOS-MEMS Pirani Gauge Based on Titanium-Nitride Heating Element for Broad-Range Vacuum Characterization;IEEE Transactions on Electron Devices;2024-02

4. Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

5. Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range;Journal of Micromechanics and Microengineering;2024-01-12

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