Squeeze film air damping ratio analysis of a silicon capacitive micromechanical accelerometer

Author:

Mo Yuming,Du Lianming,Qu BingBing,Peng Bo,Yang Jie

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Bao M, Yang H (2007) Squeeze film air damping in MEMS. Sens Actuators A 136:3–27

2. Bao M, Yang H, Sun Y, Franch PJ (2003) Modified Reynolds equation and analytical analysis of squeeze-film air damping of perforated structures. J Micromech Microeng 13:780–795

3. Beskok A (2002) Molecular-based microfluidic simulation models. In: Gad-el-Hak M (ed) The MEMS handbook. CRC Press, Boca Raton, pp 8.1–8.28

4. Bird G (1996) Molecular gas dynamics and the direct simulation of gas flows. Oxford University Press, Oxford

5. Brugdorfer A (1959) The influence of the molecular mean free path on the performance of hydrodynamic gas lubricated bearings. J Basic Eng Trans ASME 81:94–99

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