TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement-Reference-Cited by-同舟云学术

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TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement

Published:2023-10-29 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE SENSORS
language:
Short-container-title:

Author:

Garg Manu¹,Tsai Fang Wei²,Joshi Khanjan¹,Chiu Yi³,Singh Pushpapraj¹

Affiliation:

1. Indian Institute of Technology Delhi (IITD),Centre for Applied Research in Electronics (CARE),New Delhi,India,110016

2. National Yang Ming Chiao Tung University (NYCU),Department of Electronics and Electrical Engineering,Hsinchu,Taiwan,30010

3. International College of Semiconductor Technology (ICST), National Yang Ming Chiao Tung University (NYCU),Hsinchu,Taiwan,30010

Funder

Ministry of Science and Technology (MOST), Taiwan, ROC

Taiwan Semiconductor Manufacturing Company (TSMC)

National Tsing Hua University, Taiwan, R.O.C.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10324456/10324848/10325154.pdf?arnumber=10325154

Reference13 articles.

1. A CMOS-Integrated MEMS Platform for Frequency Stable Resonators-Part I: Fabrication, Implementation, and Characterization

2. Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks

3. Design and fabrication of wafer-level packaged MEMS Pirani gauge with sorrounded heat sinks

4. Overview of the MEMS Pirani Sensors

5. A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanogap CMOS-MEMS Pirani Gauge Based on Titanium-Nitride Heating Element for Broad-Range Vacuum Characterization;IEEE Transactions on Electron Devices;2024-02

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