1. State Key Laboratory of Integrated Chips and Systems, School of Microelectronics, Fudan University, Shanghai 200433, China
2. Jiashan Fudan Institute, Jiaxing 314100, China
3. School of Electronic Information Engineering, Southwest University, Chongqing 404100, China
4. National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China