Modeling and Fabrication of Micro FET Pressure Sensor with Circuits-Reference-Cited by-同舟云学术

Modeling and Fabrication of Micro FET Pressure Sensor with Circuits

Published:2007-11-19 Issue:12 Volume:7 Page:3386-3398
ISSN:1424-8220
Container-title:Sensors
language:en
Short-container-title:Sensors

Author:

Dai Ching-Liang,Tai Yao-Wei,Kao Pin-Hsu

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://www.mdpi.com/1424-8220/7/12/3386/pdf

Reference15 articles.

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2. Study of injection molding pressure sensor with low cost and small probe;Huang;Sens. Actuators A,2002

3. AeroMEMS sensor array for high-solution wall press measurments;Berns;Sens. Actuators A,2006

4. Micromachined, SiC fiber optic pressure sensors for high-temperature aerospace applications;Pulliam;Proc. SPIE,2000

5. Design, optimization and fabrication of surface micromachined pressure sensors;Lin;Mechatronics,1998

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