Comparison of the Characteristics of Metal Membrane Pressure Sensors Depending on the Shape of the Piezoresistive Patterns-Reference-Cited by-同舟云学术

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Comparison of the Characteristics of Metal Membrane Pressure Sensors Depending on the Shape of the Piezoresistive Patterns

Published:2024-05-31 Issue:3 Volume:33 Page:173-178
ISSN:1225-5475
Container-title:JOURNAL OF SENSOR SCIENCE AND TECHNOLOGY
language:en
Short-container-title:KSS

Author:

Park Jun,Kim Chang-Kyu

Funder

Ministry of Science and ICT, South Korea

Commercialization Promotion Agency for R&D Outcomes

Ministry of Education

National Research Foundation of Korea

Publisher

The Korean Sensors Society

Reference18 articles.

1. Development and Application of Resistance Strain Force Sensors

2. Piezoresistive Pressure Sensors for Applications in Harsh Environments—A Roadmap

3. Metal and Polymeric Strain Gauges for Si-Based, Monolithically Fabricated Organs-on-Chips

4. Diamond turned micro machined metal diaphragm based Fabry Perot pressure sensor

5. Modeling and Fabrication of Micro FET Pressure Sensor with Circuits

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