Basics of Atomic Layer Deposition: Growth Characteristics and Conformality
Author:
Affiliation:
1. Ghent University; Department of Solid-State Sciences, CoCooN Group; Krijgslaan 281 9000 Ghent Belgium
Publisher
Wiley-VCH Verlag GmbH & Co. KGaA
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/9783527694822.ch1/fullpdf
Reference149 articles.
1. Atomic Layer Deposition: An Overview
2. Novel materials by atomic layer deposition and molecular layer deposition
3. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
4. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
5. Tailoring nanoporous materials by atomic layer deposition
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