Low-Temperature Route to Direct Amorphous to Rutile Crystallization of TiO2 Thin Films Grown by Atomic Layer Deposition
Author:
Affiliation:
1. Surface Science Group, Faculty of Engineering and Natural Sciences, Tampere University, P.O.B. 692, Tampere FI-33014, Finland
2. Faculty of Engineering and Natural Sciences, Tampere University, P.O.B. 692, Tampere FI-33014, Finland
Funder
KAUTE-S??ti?
Pirkanmaan Rahasto
Academy of Finland
Jane ja Aatos Erkon S??ti?
Suomalainen Tiedeakatemia
Business Finland
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.2c04905
Reference66 articles.
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5. Tailored Preparation Methods of TiO2 Anatase, Rutile, Brookite: Mechanism of Formation and Electrochemical Properties
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