HIPIMS Power for Improved Thin Film Coatings
Author:
Publisher
Wiley
Subject
Surfaces, Coatings and Films,Condensed Matter Physics
Reference13 articles.
1. W.-D. Münz, VIP 1/07 p. 12-17; and W.-D. Münz VIP Vacuum´s Best 2008 p 27-32
2. Coalescence of nanometer silver islands on oxides grown by filtered cathodic arc deposition
3. Characterization of a Ti vacuum arc and the structure of deposited Ti and TiN films
4. Low‐energy ion irradiation during film growth for reducing defect densities in epitaxial TiN(100) films deposited by reactive‐magnetron sputtering
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1. Hybrid HIPIMS+MFMS power supply for dual magnetron sputtering systems;Vacuum;2020-11
2. Hardware and power management for high power impulse magnetron sputtering;High Power Impulse Magnetron Sputtering;2020
3. Microstructure and mechanical properties of Al-Mg-Ti-B coatings prepared by high power impulse magnetron sputtering (HIPIMS) at room temperature;Surface and Coatings Technology;2017-08
4. New Plasma Surface Processing Technology and its Application;Applied Mechanics and Materials;2014-11
5. Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate;Plasma Sources Science and Technology;2014-09-25
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