P-137: Vt Behaviors of LTPS-TFT Fabricated on PI substrate for Flexible Applications
Author:
Affiliation:
1. Technology Quality and Reliability Team
2. Process Development Team
3. Analytical Engineering Team Samsung Display CO. LTD.; Seobuk-gu, Cheonan-si South Korea
Publisher
Wiley
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4. A systematic study and optimization of parameters affecting grain size and surface roughness in excimer laser annealed polysilicon thin films;Marmorstein;Appl. Phys.,1997
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