Electrical conduction in rapidly annealed sputter-deposited SiO2 films (in O2Ar atmosphere) on Si
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Sputtering of SiO2 in O2Ar atmospheres
2. Electrical conduction and dielectric breakdown in sputter‐deposited silicon dioxide films on silicon
3. (Ed.), Rapid Thermal Processing, Academic Press, New York 1993.
4. Polycrystalline silicon thin-film transistors with two-step annealing process
5. , , and , in: Dielectric Layers in Semiconductors, Ed. E-MRS, Strasbourg 1986 (p. 255).
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