On the Backside Gettering of Au in Silicon
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Decoration of defects in silicon with gold, and related subjects
2. U- and W-shaped diffusion profiles of gold in silicon
3. On the Shape of the Au Depth Profile in Heat Treated Si Wafers
4. Mechanism and kinetics of the diffusion of gold in silicon
5. Gettering of gold in silicon: A tool for understanding the properties of silicon interstitials
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Room-temperature diffusion and gettering of Au in silicon stimulated by MeV electron irradiation;Journal of Physics D: Applied Physics;2015-06-05
2. Room-temperature gettering of Au in Si wafers with surface defects under small doseγ-ray radiation;Journal of Physics D: Applied Physics;2015-02-17
3. Predominance of Alternate Diffusion Mechanisms for the Interstitial-Substitutional Impurity Gold in Silicon;MRS Proceedings;2007
4. Predictive Modeling of Transition Metal Gettering: Applications and Materials Science Challenges;Springer Series in MATERIALS SCIENCE;2004
5. Gettering simulator: physical basis and algorithm;Semiconductor Science and Technology;2001-05-24
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