Room-temperature gettering of Au in Si wafers with surface defects under small doseγ-ray radiation-Reference-Cited by-同舟云学术

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Room-temperature gettering of Au in Si wafers with surface defects under small doseγ-ray radiation

Published:2015-02-17 Issue:10 Volume:48 Page:105101
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Zhang Yu,Qin Laixiang,Hou Ruixiang,Ma Nongnong,He Youqin,Chen Xiao,Yao Li,Xu Wanjing,Qin Guogang

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/48/i=10/a=105101/pdf

Reference25 articles.

1. Gettering of metals by voids in silicon

2. Gold gettering in silicon by phosphorous diffusion and argon implantation: Mechanisms and limitations

3. Al–Si alloy point contact formation and rear surface passivation for silicon solar cells using double layer porous silicon

4. On the Backside Gettering of Au in Silicon

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Physical mechanism of aluminum contamination presented in H₂O₂ plasma sterilization;AIP Advances;2022-08-01

2. Ambient-temperature diffusion and gettering of Pt atoms in GaN with surface defect region under 60Co gamma or MeV electron irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2018-01

3. Room-temperature diffusion and gettering of Au in silicon stimulated by MeV electron irradiation;Journal of Physics D: Applied Physics;2015-06-05

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