Predominance of Alternate Diffusion Mechanisms for the Interstitial-Substitutional Impurity Gold in Silicon

Abstract

AbstractIt is well known that Au indiffusion in Si is dominated by the Kick-Out mechanism governed by Si self-interstitials, with negligible contribution from the Frank-Turnbull mechanism governed by vacancies. In this paper we present modeling and simulation results to show that the Frank-Turnbull mechanism actually dominates Au outdiffusion in Si.