Ionized physical vapor deposited Al2O3 films: Does subplantation favor formation of α-Al2O3?
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Reference27 articles.
1. Optical and electrical properties of aluminum oxide films deposited by spray pyrolysis
2. The effect of residual stress on the adhesion of PECVD-coated aluminum oxide film on glass
3. Control of the structure and properties of aluminum oxide coatings deposited by pulsed magnetron sputtering
4. Silicon surface passivation by ultrathin Al2O3films synthesized by thermal and plasma atomic layer deposition
5. Thermal stability of the Al2 O3 passivation on p-type silicon surfaces for solar cell applications
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