Silicon surface passivation by ultrathin Al2O3films synthesized by thermal and plasma atomic layer deposition
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Reference15 articles.
1. Excellent passivation of highly doped p-type Si surfaces by the negative-charge-dielectric Al2O3
2. Silicon surface passivation by atomic layer deposited Al2O3
3. High efficiency n-type Si solar cells on Al2O3-passivated boron emitters
4. Surface passivation of high-efficiency silicon solar cells by atomic-layer-deposited Al2O3
5. On the c-Si surface passivation mechanism by the negative-charge-dielectric Al2O3
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