Optical and electrical properties of aluminum oxide films deposited by spray pyrolysis
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121156
Reference9 articles.
1. Epitaxial Al2O3films on Si by low‐pressure chemical vapor deposition
2. Metalorganic molecular beam epitaxy of γ‐Al2O3films on Si at low growth temperatures
3. Photo-CVD of Al2O3Thin Films
4. A study of aluminum oxide thin films prepared by atmospheric-pressure chemical vapor deposition from trimethylaluminum + oxygen and/or nitrous oxide
5. Thin layers deposited by the pyrosol process
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