Backscattered electrons from gold surface films deposited on silicon substrates: a joint experimental and computational investigation to add new potentiality to electron microscopy-Reference-Cited by-同舟云学术

Backscattered electrons from gold surface films deposited on silicon substrates: a joint experimental and computational investigation to add new potentiality to electron microscopy

Published:2012-08-02 Issue:2 Volume:45 Page:677-681
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Dapor Maurizio,Bazzanella Nicola¹,Toniutti Laura¹,Miotello Antonio¹,Crivellari Michele²,Gialanella Stefano³

Affiliation:

1. Department of Physics; University of Trento; via Sommarive 14; I-38123; Povo; Trento; Italy

2. Microtechnology Laboratory; FBK-CMM; via Sommarive 18; I-38123; Povo; Trento; Italy

3. Department of Materials Engineering and Industrial Technologies; University of Trento; via Mesiano 77; I-38123; Trento; Italy

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference41 articles.

1. Gold electrodeposition for microelectronic, optoelectronic and microsystem applications

2. Theory Experiment Comparison of the Electron Backscattering Factor from Solids at Low Electron Energy (250-5,000 eV)

3. A monte carlo study of the thickness determination of ultra-thin films

4. Contamination in a scanning electron microscope and the influence of specimen cooling

5. Electron Backscattering from Real and In-Situ Treated Surfaces

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