57‐2: Scalable Crystallization of a‐Si Film on a Glass Substrate by Using a Blue Laser-Reference-Cited by-同舟云学术

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57‐2: Scalable Crystallization of a‐Si Film on a Glass Substrate by Using a Blue Laser

Published:2018-05 Issue:1 Volume:49 Page:751-754
ISSN:0097-966X
Container-title:SID Symposium Digest of Technical Papers
language:en
Short-container-title:SID Symposium Digest of Technical Papers

Author:

Park Minok¹,Hong Seungpyo²,Jung Y.H.²,Lee Suhui²,Rho Yoonsoo¹,Park H. K.³,Grigoropoulos Costas P.¹,Jang Jin²

Affiliation:

1. Laser Thermal Laboratory, Department of Mechanical Engineering University of California at Berkeley Berkeley CA U.S.A 94720-1740

2. Advanced Display Research Center, Department of Information Display Kyung Hee University Seoul Korea 130-701

3. Laser Prismatics LLC PO Box 24803 San Jose CA U.S.A. 95154

Funder

National Science Foundation

Publisher

Wiley

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/sdtp.12345

Reference14 articles.

1. Relationship between fluence gradient and lateral grain growth in spatially controlled excimer laser crystallization of amorphous silicon films

2. 33.3: Comparison of Poly-Si TFT Characteristics Crystallized by a YAG2ω Laser and an Excimer Laser

3. Analysis of Defects in Polycrystalline Silicon Thin Films Using Raman Scattering Spectroscopy

4. Computer simulation of high speed melting of amorphous silicon

5. A thermal description of the melting of c- and a-silicon under pulsed excimer lasers

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Extremely foldable LTPS TFT backplane using blue laser annealing for low‐cost manufacturing of rollable and foldable AMOLED display;Journal of the Society for Information Display;2021-05

2. 3‐1: Distinguished Paper: Foldable LTPS TFT Backplane using Blue Laser Annealing;SID Symposium Digest of Technical Papers;2021-05

3. Blue Laser Annealed Sub-Micron Channel P-Type Low Temperature Poly-Si TFT Without Kink Effect for High-Resolution Display;IEEE Electron Device Letters;2021-02

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