33.3: Comparison of Poly-Si TFT Characteristics Crystallized by a YAG2ω Laser and an Excimer Laser-Reference-Cited by-同舟云学术

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33.3: Comparison of Poly-Si TFT Characteristics Crystallized by a YAG2ω Laser and an Excimer Laser

Published:2004 Issue:1 Volume:35 Page:1088
ISSN:0097-966X
Container-title:SID Symposium Digest of Technical Papers
language:en
Short-container-title:SID Symposium Digest

Author:

Morikawa K.,Okamoto T.,Kojima T.,Yura S.,Nishimae J.,Sato Y.,Tanaka M.,Inoue M.,Nagata H.

Publisher

Wiley

Reference4 articles.

1. A. Hara and N. Sasaki, IEDM '99 Tech. Digest, p.301 (1999)

2. Study of Crystal Growth Mechanism for Poly-Si Film Prepared by Excimer Laser Annealing

3. T. Ogawa, H. Tokioka, K. Furuta, Y. Sato, M. Inoue, S. Yagi, M. Miyasaka, S. Inoue, and T. Shimoda, EuroDisplay '99 Late news paper, p.81 (1999)

4. K. Tamagawa, H. Ikeda, T. Ohnishi, K. Kuwahara, M. Kikuchi, M. Hayama, and K. Nakamura, IDW '03 Digest, p.585 (2003)

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comprehensive analysis of blue diode laser-annealing of amorphous silicon films;Thin Solid Films;2020-02

2. 57‐2: Scalable Crystallization of a‐Si Film on a Glass Substrate by Using a Blue Laser;SID Symposium Digest of Technical Papers;2018-05

3. 35.1: Blue-Diode Laser Annealing of Amorphous Silicon Films for Low-Cost, Large-Scale Manufacturing of Advanced Displays;SID Symposium Digest of Technical Papers;2018-04

4. Poly-Si TFT Technology and Architecture;Introduction to Thin Film Transistors;2013

5. Crystallization of μc-Si on plastic substrate by using a pulsed double-frequency YAG laser;Optoelectronics Letters;2008-05

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