3‐1: Distinguished Paper: Foldable LTPS TFT Backplane using Blue Laser Annealing
Author:
Affiliation:
1. Advanced Display Research Center and Department of Information Display Kyung Hee University Seoul 130-701 Korea
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/sdtp.14595
Reference18 articles.
1. Relationship between fluence gradient and lateral grain growth in spatially controlled excimer laser crystallization of amorphous silicon films;Lee M.;Journal of Applied Physics,2000
2. Lateral Grain Growth of Amorphous Silicon Films With Wide Thickness Range by Blue Laser Annealing and Application to High Performance Poly-Si TFTs;Jin S.;IEEE Electron Device Letters,2016
3. Excimer laser-induced temperature field in melting and resolidification of silicon thin films;Hatano M.;J. Appl. Phys.,2000
4. LTPS TFT Process on Polyimide Substrate for Flexible AMOLED;Gao X.;Journal of Display Technology,2015
5. A Thermal Instability in the Laser-Driven Melting and Recrystallization of Thin Silicon Films on Glass Substrates;Grigoropoulos C.;Journal of Heat Transfer,1987
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