Excimer laser-induced temperature field in melting and resolidification of silicon thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371823
Reference20 articles.
1. Crystalline Si Films for Integrated Active-Matrix Liquid-Crystal Displays
2. Sequential lateral solidification of thin silicon films on SiO2
3. Grain Boundary Location-Controlled Polt-Si Films for Tft Devices Obtained Via Novel Excimer Laser Process
4. Excimer-Laser-Produced Single-Crystal Silicon Thin-Film Transistors
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